发明名称 SCALAR ARM
摘要 A scalar arm is provided to connect a front end of a pre-arm and a connective shaft to each other by using a synchronization unit. A scalar arm includes a pair of pre-arms(4), a supporter(1), a transfer arm(5), and a synchronization unit(6). Each of the pre-arms is composed of two arms(2,3). Each of the pre-arms is attached rotatably at the supporter. The transfer arm is formed to connect rotatably front ends of the pre-arms with each other. Connective shafts are fixed to front ends of the pre-arms connected to the transfer arm. The synchronization unit connects the connective shafts to each other. The synchronization unit includes a pair of gears and a synchronous rotation motor unit for rotating the connective shafts.
申请公布号 KR20080027145(A) 申请公布日期 2008.03.26
申请号 KR20070094381 申请日期 2007.09.17
申请人 MURATA MACHINERY. LTD. 发明人 ISHIKAWA KAZUHIRO
分类号 H01L21/68;H01L21/67 主分类号 H01L21/68
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