发明名称 Method of forming resistance variable devices
摘要 A method of forming a resistance variable device includes forming a first conductive electrode material on a substrate. A metal doped chalcogenide comprising material is formed over the first conductive electrode material. Such comprises the metal and A<SUB>x</SUB>B<SUB>y</SUB>, where "B" is selected from S, Se and Te and mixtures thereof, and where "A" comprises at least one element which is selected from Group 13, Group 14, Group 15, or Group 17 of the periodic table. In one aspect, the chalcogenide comprising material is exposed to an HNO<SUB>3 </SUB>solution. In one aspect the outer surface is oxidized effective to form a layer comprising at least one of an oxide of "A" or an oxide of "B". In one aspect, a passivating material is formed over the metal doped chalcogenide comprising material. A second conductive electrode material is deposited, and a second conductive electrode material of the device is ultimately formed therefrom.
申请公布号 US7348205(B2) 申请公布日期 2008.03.25
申请号 US20050085009 申请日期 2005.03.21
申请人 MICRON TECHNOLOGY, INC. 发明人 CAMPBELL KRISTY A.;GILTON TERRY L.;MOORE JOHN T.;LI JIUTAO
分类号 H01L21/00;G11C7/00;H01L21/8234;H01L33/00;H01L45/00 主分类号 H01L21/00
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