PATTERN FORMING METHOD, PATTERN FORMING DEVICE, METHOD FOR MANUFACTURING RECORDING MEDIUM, AND METHOD FOR MANUFACTURING MEMBER

摘要

PROBLEM TO BE SOLVED: To achieve a method of forming a pattern by which a reactive portion of a photosensitive resin is finely controlled upon forming a fine pattern on a substrate and the thickness of the photosensitive resin layer is easily controlled.

SOLUTION: The fine pattern is formed by condensing a particularly ultrashort pulse laser beam to focus on an interface between a substrate and a photosensitive resin layer so as to react the photosensitive resin layer. In this process, the ultrashort pulse laser beam is made to irradiate the layer through the substrate side.

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