发明名称 LASER BEAM MACHINING METHOD AND LASER BEAM MACHINING APPARATUS
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining method capable of accurately applying laser beam machining along a machining line formed on an object to be machined and having a straight line part and a curved line part, and a laser beam machining apparatus. <P>SOLUTION: In the laser beam machining method for applying laser beam machining along the machining line formed on the object to be machined and having the straight line part and the curved line part, the machining line formed on the object to be machined is moved relative to an irradiation position of a laser beam, a condensing spot changing means is operated upon positioning the straight line part of the machining line at the irradiation position of the laser beam, the condensing spot is formed into an elliptical shape to position the major axis of the elliptical spot along the straight line part of the machining line, and the condensing spot changing means is operated to form the shape of the condensing spot into a circular spot upon positioning the curved line part of the machining line at the irradiation position of the laser beam. <P>COPYRIGHT: (C)2008,JPO&INPIT</p>
申请公布号 JP2008062289(A) 申请公布日期 2008.03.21
申请号 JP20060245054 申请日期 2006.09.11
申请人 DISCO ABRASIVE SYST LTD 发明人 MURATA MASAHIRO;MORIKAZU YOJI
分类号 B23K26/073;B23K26/02;B23K101/40;H01L21/301 主分类号 B23K26/073
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