摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining method capable of accurately applying laser beam machining along a machining line formed on an object to be machined and having a straight line part and a curved line part, and a laser beam machining apparatus. <P>SOLUTION: In the laser beam machining method for applying laser beam machining along the machining line formed on the object to be machined and having the straight line part and the curved line part, the machining line formed on the object to be machined is moved relative to an irradiation position of a laser beam, a condensing spot changing means is operated upon positioning the straight line part of the machining line at the irradiation position of the laser beam, the condensing spot is formed into an elliptical shape to position the major axis of the elliptical spot along the straight line part of the machining line, and the condensing spot changing means is operated to form the shape of the condensing spot into a circular spot upon positioning the curved line part of the machining line at the irradiation position of the laser beam. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |