| 摘要 |
PROBLEM TO BE SOLVED: To obtain a liquid droplet ejection head which can stabilize the ejection characteristic of ink at each nozzle, and to provide a manufacturing method for the liquid droplet ejection head. SOLUTION: A channel plate unit 52 is separated to a pressure chamber plate 28 (first channel plate 28) and a second channel plate 56 which consists of a nozzle plate 21, ink pool plates 22 and 23, a through plate 24 and an ink supply passage plate 26. In a state with the pressure chamber plate 28 and a diaphragm 30 joined, a piezoelectric plate composed of piezoelectric elements is joined to a surface of the diaphragm 30. The piezoelectric plate is individualized to be separate piezoelectric member groups 42 in coincidence with positions of pressure chambers 14. The piezoelectric members 42 and the pressure chambers 14 are positioned correctly. The thickness of the diaphragm 30 is thinned by half etching the diaphragm 30, so that an amount of deformation of the diaphragm 30 is increased. The ejection characteristic of ink is thus stabilized and can be improved. COPYRIGHT: (C)2008,JPO&INPIT
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