| 摘要 |
PROBLEM TO BE SOLVED: To provide a low-cost valve module for chemical liquid with which it does not take a significant time to process a block. SOLUTION: The valve module for the chemical liquid has a first block 12 in which an apparatus attaching surface is formed in an upper surface, a chemical liquid supply port 12c formed in a first side surface, a first flow passage protruding part 12a is formed in a second side surface and a second flow passage protruding part 12b formed in a third side surface, a second block 13 in which an apparatus attaching surface is formed in an upper surface, a chemical liquid return port 13b formed in a first side surface, a first flow passage recessed part 13a is formed in a second side surface and a third block 14 wherein an apparatus attaching surface is formed in an upper surface, an output port 14c formed in a first side surface, a second flow passage recessed part 14a is formed in a second side surface. COPYRIGHT: (C)2008,JPO&INPIT
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