| 摘要 |
An apparatus for connecting a power-supplying rod to a heater of an electrostatic chuck for fixing a wafer is provided to prevent the damage of a coupling unit and to easily remove an oxidization layer during a repairing operation by preventing burning and oxidization due to the inflow of gas between screw threads. An electrostatic chuck body(500) fixes a wafer. A heater(520) is formed in the electrostatic chuck body. A connecting member(610) is coupled to apply power to the heater. A bush(620) is coupled to an end of the connecting member. A heater power load(630) is coupled to the end of the bush. A coefficient of thermal expansion of the connecting member is identical to that of the electrostatic chuck body. The connecting member, the bush, and the heater power load are adhered by an adhesive agent(700). A coating layer is formed on the lateral circumferences of a connecting unit of the connecting member, the bush, and the heater power load.
|
