| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a small-sized angular velocity sensor having a simple structure, which detects a torsional vibration component in a Y-axis rotation system. <P>SOLUTION: The angular velocity sensor 1 is equipped with a piezoelectric vibration chip 10 acquired by forming, on an XY-plane: a base part 20; driving arms 40, 50 extended in parallel with the Y-axis from the base part 20 or the first connection arm 31 and the second connection arm 32 connected to the base part 20, for performing bending vibration in the X-axis direction orthogonal to the Y-axis; and a detection arm 60 parallel to the driving arms 40, 50. The sensor 1 is also equipped with a detection means for outputting a detection signal corresponding to a vibration component generated in the detection arm 60 by a Coriolis force applied by rotation around the Y-axis. The vibration component in the Y-axis rotation system is a torsional vibration component of the detection arm 60. <P>COPYRIGHT: (C)2008,JPO&INPIT |
