| 摘要 |
Positional information of a stage (WST) within an XY flat surface is measured by a controller by using three encoders (Enc1, Enc2, Enc3) including at least each of an X encoder and a Y encoder of an encoder system. The stage (WST) is driven within the XY flat surface, based on the measurement results of the positional information and positional information (p<SUB>1</SUB>, q<SUB>1</SUB>), (p<SUB>2</SUB>, q<SUB>2</SUB>) and (p<SUB>3</SUB>, q<SUB>3</SUB>) within a surface parallel to the XY flat surface of the heads (encoders) (Enc1, Enc2, Enc3), which are used for the positional information measurement. Thus, stage shift can be accurately controlled by switching the heads (encoders) for controlling the stage (WST) while the stage is shifted, by using the encoder system which includes a plurality of the heads. |
