| 摘要 |
A deposition liquid supplying apparatus is provided to sense deposition liquid amount by a sensor and to display data of linear scale by a display part for sensing the discharged state of the deposition liquid rapidly. A deposition liquid supplying apparatus comprises a deposition liquid storing part(130), a deposition liquid discharging part(140), and a sensing part(150). The deposition liquid storing part includes a storage container(136) where a deposition liquid(142) is stored, and a pump(138) for pumping the deposition liquid. The deposition liquid discharging part discharges the deposition liquid over a substrate(102) laid on a stage(110). The sensing part includes a pumping control device(152) for applying a pumping signal to the pump, and a sensor(154) for sensing the deposition liquid amount. The pump includes a linear scale(158) having a linear sensor and a linear control device. First and second deposition liquid supplying passages(132,134) provide moving passages of the deposition liquid. A display part(156) displays data through linear scale. |
