SEMICONDUCTOR THIN FILM, THIN FILM TRANSISTOR, MANUFACTURING METHODS FOR THESE, AND APPARATUS FOR MANUFACTURING SEMICONDUCTOR THIN FILM

摘要

PROBLEM TO BE SOLVED: To obtain a semiconductor thin film with a small crystal grain diameter, having crystal grains aligned in a shape of a grid with equal intervals, a thin film transistor, manufacturing methods therefor, and an apparatus for manufacturing the semiconductor thin film.

SOLUTION: The semiconductor thin film is multi-crystallized by irradiating a laser beam 12 onto its amorphous semiconductor thin film. The semiconductor thin film has crystal grains 6 aligned in a grid shape. Further, the size of the crystal grain 6 is about half as much as the laser beam 12's oscillation wavelength.

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