| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a block copolymer usable to a chemically amplified resist excellent in sensitivity, resolution and density dependence; and a radiation sensitive resin composition using the block copolymer. <P>SOLUTION: The block copolymer has a plurality of different partial constitutional components, the plurality of different partial constitutional components including a partial constitutional component (A1) containing a repeating unit having a lactone skeleton in the side chain and a repeating unit having an acid dissociable group, and a partial constitutional component (A2) containing a repeating unit having a cyano group in the side chain, and has a mass average molecular weight of ≥1,000 and ≤200,000 in terms of standard polystyrene, measured using gel permeation chromatography. <P>COPYRIGHT: (C)2008,JPO&INPIT |
