| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for producing silicon carbide powders where silicon carbide powders having a mean particle diameter of ≤50 nm and a narrow particle size distribution width can be inexpensively produced on an industrial scale, and to provide silicon carbide powders. <P>SOLUTION: Regarding the method for producing silicon carbide powders, a silicon carbide precursor composed of a mixture obtained by mixing a carbon source and a silicon source is heat-treated in an inert atmosphere, and is further heat-treated in an oxidizing atmosphere, the obtained silicon carbide-containing material is cleaned by using a hydrofluoric acid or strong basic solution, and impurities contained in the silicon carbide-containing material are removed, so as to obtain silicon carbide powders having a mean particle diameter of ≤50 nm and a narrow particle size distribution width. <P>COPYRIGHT: (C)2008,JPO&INPIT |
