发明名称 |
Charged particle beam scanning method and charged particle beam apparatus |
摘要 |
A method and an apparatus for calculating a scan signal so that the scan region becomes a scan region which is based on magnification ratio between desired magnification in a scan-line interval direction and desired magnification in a scan-line direction, and performing a calculation for rotating the scan direction with respect to the scan signal in order to suppress a distortion which is caused to occur when the technology where the scan direction of a charged particle beam is rotated is applied to the technology where the charged particle beam is scanned such that the scan-line interval is enlarged.
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申请公布号 |
US2008054187(A1) |
申请公布日期 |
2008.03.06 |
申请号 |
US20070892332 |
申请日期 |
2007.08.22 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
YAMAMOTO KOUICHI;KAGEYAMA KANEO |
分类号 |
G06F17/14;G12B21/20;H01J37/147;H01J37/22;H01L21/027 |
主分类号 |
G06F17/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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