Method for manufacturing metal microstructure

摘要

A method of manufacturing a metal microstructure ( 1 ) by using a resin mold ( 13 ). In order to provide a method in which a mild manufacturing condition which causes less damage to the resin mold ( 13 ) can be set and the high-precision metal microstructure ( 1 ) can be mass-produced by uniform electroforming, the method of manufacturing the metal microstructure ( 1 ) according to the present invention includes the steps of: fixing on a conductive substrate ( 11 ) the resin mold ( 13 ) having a vacant portion penetrating in the direction of thickness, by interposing a photosensitive polymer ( 12 ) having a chemical composition changed by an electron beam, ultraviolet radiation or visible radiation so as to form a layered structure ( 2 ) having the resin mold ( 13 ); exposing the layered structure ( 2 ) having the resin mold ( 13 ) to an electron beam, ultraviolet radiation or visible radiation; removing an exposed photosensitive polymer ( 12 c) existing at the vacant portion of the resin mold ( 13 ); and filling with a metal ( 14 ) the vacant portion of the layered structure ( 2 ) having the resin mold ( 13 ) by electroforming.