APPARATUS FOR INSPECTING WAFER,申请号KR20070011616-传众专利搜索

首页产品黄页商标征信

会员服务注册登录

法人/股东/高管

发明名称	APPARATUS FOR INSPECTING WAFER
摘要	An apparatus for inspecting a wafer is provided to control the tilting phenomenon of a probe card and the twist of a probe needle by securing evenness of the wafer on the probe needle through exact control of a robot for a multi-shaft compensation. A probe card(40) is fixed on a probe station header(20). Plural probe needles are received in the probe card so that the probe card is electrically contacted to the wafer. A photographing unit is transferred in X- and Y-directions by a driving unit to scan a plane image of the wafer and a plane image of the probe needle. The wafer is mounted on a robot for a multi-shaft compensation. The robot for a multi-shaft compensation compensates a position of the wafer so that the probe needle and the wafer are parallel according to the plane image information scanned by the photographing unit. The robot for a multi-shaft compensation includes a fixing plate(210), plural legs(220), and a head plate(230).
申请公布号	KR100809600(B1)	申请公布日期	2008.03.04
申请号	KR20070011616	申请日期	2007.02.05
申请人	NEW CENTURY CO., LTD.	发明人	LEE, JUNG IL
分类号	H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
地址

您可能感兴趣的专利

Method for producing wood-like surface for e.g. cupboard in kitchen area, involves applying layer of mixture of latex and stone in pulverized form, and adding plastic e.g. PVC, and organic material with mixture of latex and stone

Variable speed gearbox for use in e.g. tractor utilized for agricultural purpose, has multi-disk clutch including clutch casing standing in engagement with gear teeth of another clutch casing, and fixed gear combing with another fixed gear

Arrangement for adjusting fuel consumption of internal combustion engine in motor vehicle, has evaluation and control unit providing maximum performance of combustion engine by engine control unit based on actuation of manual control unit

Hearing aid, has oscillator circuit determining resonant frequency of quartz crystal, where parameter influencing signal processing in aid is automatically adjusted in dependence of resonance frequency

Continuous treatment of viscous paste-like product in mixing kneader having spinning mixing element and permeable product- and gas chamber, comprises determining filling grade of the product by using rotational moment of the mixing element

Cylindrical roller bearing cage, has ring-shaped peripheral element including two plastic liners corresponding to two ring-shaped retaining elements, and bar elements fixed to retaining elements by plastic liners

Radially flexible flexspline for e.g. superimposed transmission of power steering system of passenger car, has external teeth manufactured by deformation device in deformed condition and during operation of flexspline

Brush roller, has cylindrical brush body arranged with brushes, where bristles of brushes are inclined toward closed ends of brush body and brushes extend in longitudinal direction of brush body

Method for reducing secondary lobe of semiconductor radar transmitter in radar system in e.g. ship, involves performing multiple measurement processes with different intensity profiles, and adjusting different intensities

Slurry pump i.e. concrete pump, has boost pressure device fitted at suction line to compress slurry, where medium flow is supplied to another medium flow for temporary reinforcement of former medium flow

T-joint for facade and illuminating roof, has base body arranged at front side in bar profile, moveable clamp body mounted on connector, and pins protruding from base body and fixedly clamped against edge section of opening by clamp body

Data processing device has material with homochiral magnetic component, where material is arranged to form crystalline structure, and crystalline structure either lacks inversion symmetry, or has interface when inversion symmetry is present

Portable device for holding hygienic object at place of application, comprises receiving area, radiation source, and voltage supply unit, where receiving area is provided for receiving object

Drinking container i.e. drinking glass, for use in catering area for drinking milk, has signal transmitter sending mechanical waves into container, and signal receiver converting received mechanical waves into electrical signals

Light sources i.e. red, green, blue LEDs, controlling method for e.g. stage lighting, involves fragmenting and outputting signals of computer to control devices, and converting signals into control signals of light sources by devices

System for supplying water to pot plants, has insertion body including upper end downwardly inserted through pot hole in pot core and lower end projecting over ring-shaped extension piece in water reservoir

Diagnostic aid for determining clinical picture based on color of e.g. urine of patient, has sheets with color imprints in color, where imprints are executed in characteristics of clinical picture with respect to variations of basic color

Method for raw-material testing fibrous material web e.g. paper web, in laboratory, involves stripping partial areas of surface of material web so that inside layer plane of fibrous material web is visible, and testing web in stripped area

Triggering threshold adjusting device for releasing e.g. airbag in passenger car, involves setting threshold corresponding to distance changing signal to adjust threshold for releasing restraint unit to consecutively cross subsurface

Vehicle door i.e. side door, for passenger car, has locking bar directly attached to door lock and inserted into interior of lock, and passage opening provided in area of wet-dry chamber separation and guided into dry chamber of door