| 摘要 |
A light source apparatus is provided to detect an installing state of a short arc type discharge lamp for exposure in a semiconductor and a liquid crystal panel. A lamp includes a tap(20) to supply electric power by protecting and supporting mechanically a valve(10) of a light emitting part(9) for radiating light. A tap holder(30) is formed to protect and support the lamp by using the tap. A lamp detection unit detects an installing state of the tap at the tap holder by using the light. A control unit controls a lighting state and a non-lighting state of the lamp according to an output of the lamp detection unit. The lamp detection unit includes a light source for detection, an optical transmission line for guiding the light from the light source for detection to the tap, and a light receiving part for sensing a change of the light from the light source by the presence of the tap.
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