发明名称 |
Cabinet for chemical delivery with solvent purging and removal |
摘要 |
The present invention is an apparatus and process for storing and delivering a low vapor pressure process chemical to a process tool for semiconductor fabrication, comprising: a) a bulk container for storing the process chemical; b) a process container for delivering the process chemical to the process tool; c) a first manifold for delivering process chemical from the bulk container to the process container; d) a solvent container containing a quantity of solvent, e) a second manifold for delivering the process chemical from the process container to a process tool; f) a solvent recovery container for containing used solvent and removed process chemical, and, g) a solvent evaporator to differentially remove solvent from process chemical in the solvent recovery container by entrainment in a carrier gas, vacuum removal, heating or combinations thereof. The containers can be baffled on their inert gas inlets. The cabinet can be heated. |
申请公布号 |
US7334595(B2) |
申请公布日期 |
2008.02.26 |
申请号 |
US20050104012 |
申请日期 |
2005.04.12 |
申请人 |
AIR PRODUCTS AND CHEMICALS, INC. |
发明人 |
BIRTCHER CHARLES MICHAEL;MARTINEZ MARTIN CASTANEDA;STEIDL THOMAS ANDREW;VIVANCO GIL;SILVA DAVID JAMES |
分类号 |
G05D7/00;H01L21/205;B08B5/00;B67D7/02;F17C13/04 |
主分类号 |
G05D7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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