A FOUP STOCKER FOR LOADLOCK CHAMBER DIRECT-COUPLED TO LOAD PORT

摘要

An FOUP stocker for a load-lock chamber directly connected to a load port is provided to reduce FOUP print by installing an FOUP transfer unit on an upper portion of the load-lock chamber. A load-lock chamber(30) having a carrier arm is directly connected between a load port(10) and a process chamber(40). A multi-staged shelf(51) is installed on an upper portion of the load port so that plural FOUPs(20) are mounted. A bay partition spatially separates the load port from the load-lock chamber, and has an opening at a position corresponding to the shelf, through which the FOUPs are moved. An FOUP(Front Opening Unified Pod) transfer unit is installed on the load-lock chamber to transfer the FOUPs between the shelf and the load port. A sealing plate(80) spatially separates the FOUP transfer unit from the load-lock chamber.