| 摘要 |
PROBLEM TO BE SOLVED: To provide a device of measuring a transmission wavefront by a Fizeau interferometer capable of maintaining a liquid surface fixedly to an immersion lens. SOLUTION: A lens holder 24 has a cup-like shape, has a through hole 24b for fitting the immersion lens 10 at the center, and is fitted into a through hole 23a in a Y-direction inclination table 23. Then, the immersion lens 10 is arranged nearly at the center of the internal space of the Y-direction inclination table 23. A lens barrel 32 for holding a semispherical lens 31 with its light axis in a perpendicular direction is held so that the position can be adjusted in the direction of a light axis by a semispherical surface holding section 30. A liquid surface adjustment member 33 having a traverse area of which the total is equal to that of the traverse surface of the lens barrel including the semispherical lens 31 is provided at one portion of the upper edge of the lens barrel 32 so that it projects upward from the side of the semispherical lens 31. A rubber film as a sealing means for preventing the leakage of liquid is provided liquid-tightly between the lower edge of the Y-direction inclination table 23 and the outer periphery of the lens barrel 32. COPYRIGHT: (C)2008,JPO&INPIT
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