| 摘要 |
PROBLEM TO BE SOLVED: To provide a turbo molecular pump easy of balance correcting work for a rotor and free from destruction of the rotor due to stress concentration resulting from balance correction with the cutting of a cylindrical thin portion on the lower part of the rotor. SOLUTION: Through a column insertion hole 1a and an inspection hole 61b provided in the outer periphery of a lower-side axial electromagnet 6b of an axial magnetic bearing 6, a balance correcting screw 20 is threaded into a screw hole 61d in the outer periphery of a disc 6d of the axial magnetic bearing 6, when carrying out the balance correction of the rotor. After finishing balance correcting work, a bottom cover 8 is mounted on the lower face of a base 1 for shutting off the inside from outside air. COPYRIGHT: (C)2008,JPO&INPIT
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