发明名称 LOAD LOCK CHAMBER WITH HEATER IN TUBE
摘要 <p>Embodiments of the invention include a heated load lock chamber. In one embodiment, a heated load lock chamber includes a chamber body having a plurality of lamp assembles disposed at least partially therein. Each lamp assembly includes a transmissive tube housing a lamp. The transmissive tube extends into the chamber body and provides a pressure barrier isolating the lamp from the interior volume of the load lock chamber. In another embodiment, an open end of the transmissive tube extends through a sidewall of the chamber body. A closed end of the transmissive tube is surrounded by the interior volume of the chamber body and is supported below a top of the chamber body in a spaced apart relation. The open end of the tube is sealed to the sidewall of the chamber body such that the interior of the tube is open to atmosphere.</p>
申请公布号 WO2008022029(A2) 申请公布日期 2008.02.21
申请号 WO2007US75699 申请日期 2007.08.10
申请人 LEE, JAE-CHULL;APPLIED MATERIALS, INC.;ANWAR, SUHAIL;KURITA, SHINICHI 发明人 ANWAR, SUHAIL;LEE, JAE-CHULL;KURITA, SHINICHI
分类号 H01J1/02 主分类号 H01J1/02
代理机构 代理人
主权项
地址