| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an oxide target which has high electroconductivity, and does not cause overdischarge and the blackening of the surface of the target. <P>SOLUTION: The oxide target includes Indium (In), tin (Sn) and gadolinium (Gd), and also includes an oxide expressed by Gd<SB>2</SB>Sn<SB>2</SB>O<SB>7</SB>and/or GdInO<SB>3</SB>. <P>COPYRIGHT: (C)2008,JPO&INPIT |
