| 摘要 |
PROBLEM TO BE SOLVED: To provide a rotation support device for a disk substrate which supports a stable rotation of the disk substrate having a center hole with a simple mechanism. SOLUTION: In the rotation support device 10 for the disc substrate 100, by which the disc substrate 100 with a center hole is supported at its inner peripheral edge 102 and rotated, a pushing body 34 biases a rod 26 downward that is inserted in a hollow hole 12a of a vertically supported spindle 12. As a result, an elastic body 30 is pressed by a guide piece 28 fixed at a top edge of the rod 26, expands its diameter, comes in pressure contact with the inner peripheral edge 102 of the disc substrate 100, and thus supports the disc substrate 100. The elastic body 30 has a smaller diameter than that of the center hole of the disc substrate 100 when the rod 26 is shifted upward contrary to the biasing force of the pressing body 34, and the elastic body 30 has no external force from the guide piece 28. COPYRIGHT: (C)2008,JPO&INPIT
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