TECHNIQUE FOR IMPROVING UNIFORMITY OF A RIBBON BEAM

摘要

A technique for improving uniformity of a ribbon beam is disclosed. In one particular exemplary embodiment, an apparatus (300) may comprise a first corrector-bar assembly (302) and a second corrector-bar assembly (304), wherein the second corrector-bar assembly is located at a predetermined distanced from the first corrector-bar assembly. Each of a first plurality of coils in the first corrector-bar assembly may be individually excited to deflect at least one beamlet in the ribbon beam(30), thereby causing the beamlets to arrive at the second corrector-bar assembly in a desired spatial spread. Each of a second plurality of coils in the second corrector-bar assembly may be individually excited to further deflect one or more beamlets in the ribbon beam, thereby causing the beamlets to exit the second corrector-bar assembly at desired angles.