摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing an optical waveguide which has a highly accurate shape, superior dimensional stability, and excellent transmission characteristics, in a simple manufacturing process and with superior work efficiency. <P>SOLUTION: The method for manufacturing the optical waveguide 1 containing a lower clad layer 2, a core 3 and an upper clad layer 4 includes: a process of laminating, on the lower clad layer 2, a film composed of a synthetic resin containing fillers with a number average grain size of 5-100 nm, so as to turn into a state in which a photosensitive composition layer for forming the core is interposed; a process of forming a core pattern-contained layer composed of hardened and unhardened portions by irradiating the photosensitive composition layer with light through the film, with the film abutted on the photosensitive composition layer; a process of obtaining a laminated body including the lower clad layer and the core by developing the core pattern-contained layer after the film is peeled off; and a process of forming the upper clad layer on the lower clad layer and the core. <P>COPYRIGHT: (C)2008,JPO&INPIT |