发明名称 |
FUNCTIONAL FILM CONTAINING STRUCTURE AND METHOD OF MANUFACTURING FUNCTIONAL FILM |
摘要 |
<p>A method of manufacturing a functional film by which a functional film formed on a film formation substrate can be easily peeled from the film formation substrate. The method includes the steps of: (a) forming an electromagnetic wave absorbing layer on a substrate by using a material which absorbs an electromagnetic wave to generate heat; (b) forming a separation layer on the electromagnetic wave absorbing layer by using an inorganic material which is decomposed to generate a gas by being heated; (c) forming a layer to be peeled containing a functional film; and (d) applying the electromagnetic wave toward the electromagnetic wave absorbing layer so as to peel the layer to be peeled from the substrate or reduce bonding strength between the layer to be peeled and the substrate.</p> |
申请公布号 |
EP1888808(A2) |
申请公布日期 |
2008.02.20 |
申请号 |
EP20060747258 |
申请日期 |
2006.06.05 |
申请人 |
FUJIFILM CORPORATION |
发明人 |
SAKASHITA, YUKIO |
分类号 |
H01L21/762;C23C14/00;H01L21/268;H01L21/683 |
主分类号 |
H01L21/762 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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