| 摘要 |
FIELD: physics; measurements. ^ SUBSTANCE: present invention pertains to measurement technology and can be used in determining the physical and mechanical state of material, particularly residual voltage when etching samples. The essence of the invention lies in that, analysed layers are removed from the sample using electroetching. The etching process is carried out with constant surface potential. Current is regulated at the same time, the change from which the etching transition time from the coating to the base is determined. The stratum depth of the analysed layers is determined in real time on the quantity of electricity passed through (coulometric). Simultaneously, change in deformation of the sample is registered and residual voltage is calculated from the change in deformation with change in stratum depth of the analysed layers. The etching process is carried out in an aqueous electrolyte containing the following, in wt %: hydrofluoric acid: 6.0, sulphuric acid: 24.4, nitric acid: 9.0. The device has a three-electrode electrolytic bath with a cathode, reference electrode and an anode in form of a sample, placed horizontally in a holder. The current source is connected to the cathode and the sample. The current source is a potientiostat with feedback. The device has an actuator for the sample holder and a computer. The computer is connected to the sample deformation converter and current source, and through the current source, to the reference electrode and to the actuator of the sample holder. ^ EFFECT: increased output, accuracy and information content of the control process. ^ 5 cl, 4 dwg |
