CONTINUOUS LITHOGRAPHY APPARATUS AND METHOD USING ULTRAVIOLET ROLL NANOIMPRINTING

摘要

A continuous lithography apparatus using an ultraviolet roll is provided to embody formation of a high-density high-integrated circuit pattern by forming a fine pattern as compared with a conventional dry film process. By using a pattern roll stamper(321) having a pattern, an ultraviolet roll nano imprinting process is performed on a photoresist layer formed on a conductive layer to form a photoresist layer pattern. A first removing part removes a residual photoresist layer. A second removing part removes the exposed portion of the conductive layer. A third removing part removes the rest of the photoresist layer. The conductive layer can be formed on an insulation substrate.