| 摘要 |
An electron filter for a negative ion source using a chicane magnet is provided to reduce a time for arranging a connection device along a final output direction of a negative ion by effectively separating electrons and matching the output direction with an initial input direction of the negative ion. An electron filter for a negative ion source includes a chicane magnet(200) and a transfer pipe(209). The chicane magnet is formed by sequentially arranging three pairs of magnetic poles. The transfer pipe is formed through between each of the three pairs of magnetic poles in order and plays a transfer passage of a negative ion. At a side of the transfer pipe, a division pipe is formed to discharge electrons inputted together with the negative ion. The chicane magnet includes an upper magnet and a lower magnet. The upper magnet includes a first upper magnetic pole(201), a second upper magnetic pole(202), and a third upper magnetic pole(203) to be arranged in order. The lower magnet includes a first lower magnetic pole(204), a second lower magnetic pole(205), and a third lower magnetic pole(206) to face each magnetic pole of the upper magnet and be arranged in order.
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