MIKROSTRUKTUR UND VERFAHREN ZU DEREN HERSTELLUNG,申请号AT20010951392T-传众专利搜索

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发明名称	MIKROSTRUKTUR UND VERFAHREN ZU DEREN HERSTELLUNG
摘要
申请公布号	AT384024(T)	申请公布日期	2008.02.15
申请号	AT20010951392T	申请日期	2001.06.13
申请人	MEMSFAB GMBH	发明人	BERTZ, ANDREAS;GESSNER, THOMAS;KUECHLER, MATTHIAS;KNOEFLER, ROMAN
分类号	B81B3/00;B81C1/00	主分类号	B81B3/00
代理机构		代理人
主权项
地址

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