发明名称 Semiconductor device and manufacturing method thereof
摘要 A semiconductor device including a SRAM section and a logic circuit section includes: a first n-type MIS transistor including a first n-type gate electrode formed with a first gate insulating film interposed on a first element formation region of a semiconductor substrate in the SRAM section; and a second n-type MIS transistor including a second n-type gate electrode formed with a second gate insulating film interposed on a second element formation region of the semiconductor substrate in the logic circuit section. A first impurity concentration of a first n-type impurity in the first n-type gate electrode is lower than a second impurity concentration of a second n-type impurity in the second n-type gate electrode.
申请公布号 US2008036010(A1) 申请公布日期 2008.02.14
申请号 US20070808620 申请日期 2007.06.12
申请人 发明人 TAMAKI TOKUHIKO;KOTANI NAOKI;TAKEOKA SHINJI
分类号 H01L27/092;H01L21/8238 主分类号 H01L27/092
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