| 摘要 |
A cleaning apparatus for cleaning a mixing vaporizer is provided to eliminate attachment adhered to the inner wall of the mixing vaporizer without disassembling the mixing apparatus by circulating cleaning solution through first and second pipes and the mixing vaporizer. A cleaning apparatus for cleaning a mixing vaporizer comprises a cleaning solution tank(100), a circulation pump(200), a first pipe(310), a second pipe(320). Cleaning solution is stored in the cleaning solution tank. The circulation pipe is connected to the cleaning solution tank. The first pipe connects the cleaning solution tank with a raw material liquid inlet(12) of a gas-liquid mixing unit(30), and feeds cleaning solution liquid to a mixing space(16) of the gas-liquid mixing unit through the circulation pump. The second pipe returns the cleaning solution, which passed through the mixing space of the gas-liquid mixing unit, sent to a vaporization unit(60), and then exhausted to an injection pipe(50), to the cleaning solution tank.
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