HARD CARBON FILM AND SURFACE-ACOUSTIC-WAVE SUBSTRATE

摘要

The invention offers a hard carbon film and a SAW substrate that are easy t o fabricate or low in manufacturing cost while virtually maintaining the quali ty that affects the important properties of a device that comprises the hard carbon film or the SAW substrate. The hard carbon film comprises a composite film o f graphite-like diamond and carbon clusters; the composite film has a continuo us crystal structure.