发明名称 |
IMAGE SENSOR FABRICATING METHOD |
摘要 |
A method for manufacturing an image sensor is provided to form a gapless micro-lens in an exposure process for a photoresist layer. A photoresist layer(25) for forming a micro-lens is formed on a color filter array. A first exposure process is performed by using a first mask. A line-shaped pattern in a first direction with respect to the photoresist layer is formed on the first mask. A second exposure process is performed by using a second mask(31). A line-shaped pattern in a second direction with respect to the photoresist layer is formed on the second mask. A micro-lens is formed by performing a developing process with respect to the photoresist layer.
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申请公布号 |
KR100802303(B1) |
申请公布日期 |
2008.02.11 |
申请号 |
KR20060134785 |
申请日期 |
2006.12.27 |
申请人 |
DONGBU ELECTRONICS CO., LTD. |
发明人 |
MOON, JU HYOUNG |
分类号 |
H01L27/146 |
主分类号 |
H01L27/146 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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