发明名称 IMAGE SENSOR FABRICATING METHOD
摘要 A method for manufacturing an image sensor is provided to form a gapless micro-lens in an exposure process for a photoresist layer. A photoresist layer(25) for forming a micro-lens is formed on a color filter array. A first exposure process is performed by using a first mask. A line-shaped pattern in a first direction with respect to the photoresist layer is formed on the first mask. A second exposure process is performed by using a second mask(31). A line-shaped pattern in a second direction with respect to the photoresist layer is formed on the second mask. A micro-lens is formed by performing a developing process with respect to the photoresist layer.
申请公布号 KR100802303(B1) 申请公布日期 2008.02.11
申请号 KR20060134785 申请日期 2006.12.27
申请人 DONGBU ELECTRONICS CO., LTD. 发明人 MOON, JU HYOUNG
分类号 H01L27/146 主分类号 H01L27/146
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