| 摘要 |
PROBLEM TO BE SOLVED: To efficiently and reliably clean a micro probe (micro tweezers) holding particles after they are removed from a treated object using the micro probe. SOLUTION: Only a part 2A of the micro probe 2 holding the particles is inserted through an extremely narrow inlet 10 into a cleaning processor 9. The particles are removed from the micro probe 2 by a detergent or an aerosol of the processor 9. COPYRIGHT: (C)2008,JPO&INPIT
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