| 摘要 |
PROBLEM TO BE SOLVED: To miniaturize a picture element and suppress the variation of the transparent characteristics of a color filter for each product. SOLUTION: The solid-state image pickup device comprises a semiconductor substrate 101 having photoelectric converters 103B, 103R, and 103G; and a color filter 106 which is constituted on the semiconductor substrate 101 by sequentially laminating a multilayer film 106A, a spacer layer 106C, and a multilayer film 106B and in which the thickness of the spacer layer 106C is varied for each of regions corresponding to the photoelectric converters 103B, 103R, and 103G. A layer 106d adjacent to the spacer layer 106C of a layer constituting the multilayer film 106A comprises silicon nitride (Si<SB>3</SB>N<SB>4</SB>). The spacer layer 106C comprises silicon dioxide (SiO<SB>2</SB>). COPYRIGHT: (C)2008,JPO&INPIT |
