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发明名称
METHOD FOR FORMING RUTHENIUM STORAGE NODE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
KR100798788(B1)
申请公布日期
2008.01.29
申请号
KR20010079306
申请日期
2001.12.14
申请人
发明人
分类号
H01L27/108;(IPC1-7):H01L27/108
主分类号
H01L27/108
代理机构
代理人
主权项
地址
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