HANDLER AND METHOD OF INSPECTING SEMICONDUCTOR DEVICE USING THE HANDLER

摘要

PROBLEM TO BE SOLVED: To provide a handler capable of measuring efficiently a plurality of semiconductor devices, and an inspection method therefor. SOLUTION: An arm control part 106 is constituted such that a control timing for performing contact control for putting semiconductor devices 103a, 103b which are inspection objects into a contact state with sockets 104a, 104b or into a non-contact state is controlled relative to each contact arm 101a, 101b. When a 'defective product' is generated in a specific measuring part, it can be replaced with an uninspected product only in the measuring part determining the 'defective product', to thereby execute inspection efficiently, by executing simultaneous measurement of the plurality of numbers of products by using the handler 107. COPYRIGHT: (C)2008,JPO&INPIT