| 摘要 |
PROBLEM TO BE SOLVED: To improve the capability of a scanning probe microscope following the surface and to improve the drawing accuracy of surface topography. SOLUTION: This system is provided with an estimator (180) which estimates the position of a probe tip controlled perpendicularly by a micro electro-mechanical system (MEMS) actuator (110). COPYRIGHT: (C)2008,JPO&INPIT |
