PIEZOELEKTRISCHES GERÄT, TINTENSTRAHLDRUCKKOPF, VERFAHREN ZUM HERSTELLEN UND DRUCKER

摘要

A piezoelectric device 40 of the present invention comprises: an adhesive layer 401 composed of a material which enhances adhesion between a base plane of a piezoelectric device 30 and a lower electrode 403; a diffusion preventing layer 402 formed with a material which prevents a phenomenon of diffusion of a component of the adhesive layer 401 into a lower electrode 403; the lower electrode formed over the diffusion preventing layer 402; a piezoelectric film 404 which is formed over the lower electrode 402 and which exhibits an electromechanical transducing action; and an upper electrode 405 formed over the piezoelectric film 404 so as to be paired with the lower electrode 403. The diffusion preventing layer 402 prevents the diffusion of titanium which is the principal component of the adhesion layer 401.