发明名称 |
Inprintable medium dispenser |
摘要 |
<p>An imprintable medium dispenser includes a chamber, a nozzle, and an actuator connected to the chamber and configured to be actuated and thereby generate a pressure wave within the chamber such that imprintable medium is dispensed from the nozzle. The imprintable medium dispenser is provided with a control circuit which includes a monitoring apparatus configured to receive a transient oscilliniun signal generated when the actuator is actuated, and to monitor the operation of the imprintable medium dispenser by monitoring the transient oscillation signal.
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申请公布号 |
EP1873587(A3) |
申请公布日期 |
2008.01.23 |
申请号 |
EP20070252511 |
申请日期 |
2007.06.20 |
申请人 |
ASML NETHERLANDS BV |
发明人 |
DIJKSMAN, JOHAN FREDERIK;PIERIK, ANKE;VERNHOUT, MARTIN MAURICE;WUISTER, SANDER FREDERIK;KRUIJT-STEGEMAN, YVONNE WENDELA;SCHRAM, IVAR |
分类号 |
G03F7/00 |
主分类号 |
G03F7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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