发明名称 Inprintable medium dispenser
摘要 <p>An imprintable medium dispenser includes a chamber, a nozzle, and an actuator connected to the chamber and configured to be actuated and thereby generate a pressure wave within the chamber such that imprintable medium is dispensed from the nozzle. The imprintable medium dispenser is provided with a control circuit which includes a monitoring apparatus configured to receive a transient oscilliniun signal generated when the actuator is actuated, and to monitor the operation of the imprintable medium dispenser by monitoring the transient oscillation signal. </p>
申请公布号 EP1873587(A3) 申请公布日期 2008.01.23
申请号 EP20070252511 申请日期 2007.06.20
申请人 ASML NETHERLANDS BV 发明人 DIJKSMAN, JOHAN FREDERIK;PIERIK, ANKE;VERNHOUT, MARTIN MAURICE;WUISTER, SANDER FREDERIK;KRUIJT-STEGEMAN, YVONNE WENDELA;SCHRAM, IVAR
分类号 G03F7/00 主分类号 G03F7/00
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