发明名称 Thin-film transistor and method of fabricating the same
摘要 Provided are a thin-film transistor formed by connecting polysilicon layers having different conductivity types with each other which prevents occurrence of inconvenience resulting from diffusion of impurities and a method of fabricating the same. A drain ( 6 ), a channel ( 7 ) and a source ( 8 ) are integrally formed on a surface of a second oxide film ( 4 ) by polysilicon. The drain ( 6 ) is formed to be connected with a pad layer ( 3 ) (second polycrystalline semiconductor layer) through a contact hole ( 5 ) which is formed to reach an upper surface of the pad layer ( 3 ). The pad layer ( 3 ) positioned on a bottom portion of the contact hole ( 5 ) (opening) is provided with a boron implantation region BR.
申请公布号 US7321152(B2) 申请公布日期 2008.01.22
申请号 US20060498800 申请日期 2006.08.04
申请人 发明人
分类号 H01L29/76;H01L31/113 主分类号 H01L29/76
代理机构 代理人
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