发明名称 METHOD FOR INPUTTING INDEX DATA
摘要 An index data input method is provided to prevent malfunction due to input error by temporarily stopping a blade at a position designated by a user, prior to actual index operation. When each virtual specimen is assigned with an eigenvalue, a labeling unit is input with desired data for displacement of actual specimens from a user(S200). If a virtual index line is selected by a user input member, except for a virtual index line which is not machined, the selected virtual index line is output in a different shape so as to distinguish it from a virtual index line which is not selected(S210). Lines of the specimens are automatically aligned by using a mechanical position of two points(S220). An error correction unit receives position correction data for collecting a difference between a position of a blade and a position of the index line of the specimen(S230).
申请公布号 KR100795732(B1) 申请公布日期 2008.01.21
申请号 KR20060107432 申请日期 2006.11.01
申请人 AM TECHNOLOGY CO., LTD. 发明人 LEE, HAE DONG;KIM, HYUNG TAE;KIM, SUNG CHUL;BAEK, SEUNG YUB
分类号 H01L21/02 主分类号 H01L21/02
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