| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a thin-film piezoelectric resonator capable of reducing the electrical resistance of electrode, without affecting the resonance characteristics of a resonance part, and to provide a manufacturing method thereof. <P>SOLUTION: The thin-film piezoelectric resonator is provided having a lower electrode 2, an upper electrode 3, and a piezoelectric material film 4 provided between the lower electrode and upper electrode, and is such that at least either of the lower electrode or the upper electrode has hollow portions 5 and 6. <P>COPYRIGHT: (C)2008,JPO&INPIT |
