Particles are removed from a surface of a substrate by a method comprising causing liquid aerosol droplets comprising water and a tensioactive compound to contact the surface with sufficient force to remove particles from the surface.
申请公布号
WO2008008216(A2)
申请公布日期
2008.01.17
申请号
WO2007US15268
申请日期
2007.06.29
申请人
FSI INTERNATIONAL, INC.;BUTTERBAUGH, JEFFERY, W.;GAST, TRACY, A.