| 摘要 |
PROBLEM TO BE SOLVED: To provide an active matrix TFT array substrate excellent in reliability and productivity. SOLUTION: This active matrix TFT array substrate is provided with a gate electrode 2 and a gate wiring 4 each made of a first metallic film on a transparent insulating substrate 1, a gate insulating film 5 for covering the gate electrode 2 and the gate wiring 4, a semiconductor layer formed on the gate insulating film 5, a source electrode 8b and a drain electrode 8a formed on the semiconductor layer, and a pixel electrode 8 made of a transparent conductive film. In this array substrate, at least any one of the source electrode 8b and the drain electrode 8a is made of the transparent conductive film 8, and a second metallic film 9 is provided thereon. COPYRIGHT: (C)2008,JPO&INPIT |
