Encapsulated microcomponent equipped with at least one getter

摘要

The microcomponent has a cover (3) delimiting a sealed cavity (4), and equipped of an orifice (5) that is provided with a stopper (6). The stopper includes a portion made of a getter material e.g. titanium, exposed inside the sealed cavity. A sealing portion of the stopper is surmounted in the getter portion. The getter portion includes a columnar structure zone that is extended by a crystallized structure zone, where the columnar zone is spaced away from the cover than the crystallized zone. An independent claim is also included for a method for forming an encapsulated microcomponent.