| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical semiconductor device that has a surface light-emission semiconductor laser and an electrostatic discharge protection element, and that is capable of high-speed driving; and to provide a manufacturing method therefor. SOLUTION: The optical semiconductor device comprises on the semiconductor substrate: the multilayer-structured surface light-emission semiconductor laser for emitting laser light in the direction perpendicular to the surface of a semiconductor substrate; a multilayer-structured photodetection element formed beyond or below the surface light-emission semiconductor laser; and the electrostatic discharge protection element for protecting the surface light-emitting semiconductor laser against an electrostatic discharge damage. Furthermore, a pair of pads 35c, 36c for driving the surface light-emission semiconductor laser, and a pair of pads 35c, 36c for the photodetection element are provided independently from each other. COPYRIGHT: (C)2008,JPO&INPIT
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