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发明名称
SPUTTERING TARGET AND METHOD FOR PREPARING THE SAME AND FILM-FORMING METHOD
摘要
申请公布号
EP1251188(B1)
申请公布日期
2008.01.09
申请号
EP20000966446
申请日期
2000.10.12
申请人
AGC CERAMICS CO., LTD.
发明人
MITSUI, AKIRA;UEDA, HIROSHI;KANDA, KOUICHI;NAKAGAMA, SUSUMU
分类号
C23C14/34;C03C17/245;C04B41/88;C04B35/573;C04B41/50;C04B41/85;C23C14/10
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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